|Supply Ability:||100 Ton/Tons per Year|
|Brand Name:||Best gas|
|Place of Origin:||Zhejiang China|
|Product name:||Nitrogen trifluoride|
|Model Number:||Nitrogen trifluoride|
|Packaging Detail:||8L/12L/47L/470L or custom by seamless steel cylinder|
Nitrogen trifluoride NF3(COA)
Hydrogen trifluoride is a strong hydrogenating agent. Hydrogen trifluoride is an excellent plasma etching gas in the microelectronics industry. It is cleaved into active fluoride ions during ion etching. These fluoride ions have excellent etching rate and selectivity for silicon and tungsten compounds and high purity nitrogen trifluoride ( For silicon hydride and silicon), it does not leave any residue on the surface of the etched material during etching. It is a very good cleaning agent and has been widely used in chip manufacturing and high-energy lasers.